- CUBEGM-Xα Series (Buffer tank specification) is an all-in-one unit that has a Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve Gas Mixer and Buffer tank.
- Program operation: Program operation is possible by setting the flow rate and time of each line.
- Alarm function: Alarm sound is notified if an error occurs by any upper / lower limit setting of each line flow rate.
- The pressure in the buffer tank is constantly monitored, and when the pressure falls below a fixed pressure, gas is automatically supplied to the buffer tank at the set mixing ratio. (Automatic stop and automatic restart pressure are fixed values, so please inquire in advance.)
- Simply connect the piping to the INside and OUTside.
- Easy to move due to stoppered casters.
- [CUBEGM-Xα Series] is a device that supplies a mixed gas species of 2, 3, 4 to set up and control to any of the flow rates.
- Analog mass flow controller [1000 Series] is mounted as a standard feature.
- The mass flow controller, which flow control range is from 10SCCM to 50SLM, can be mounted as a standard. In other cases, please contact us.
- It can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that have been prepared in the mixing ratio.
- It can be used for a wide range of applications such as analysis, environment, bio, packaging, medical, gas welding.
- Applicable gases: Inert gas. (For more information, please contact us)
|Size||CUBEGM-Xα2 : W350×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank
CUBEGM-Xα3 : W430×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank
CUBEGM-Xα4 : W510×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank
|Current consumption||About 125VA ※In the case of 3 mass flow controllers equipped with|
|Flow range (*1)||≦50SLM（Total flow rate）|
|Flow rate control range||1 LINE: F.S.10SCCM～20SLM|
|Flow rate control||MFC : C1000 Series or FCST1000L Series|
|Flow rate output signals||0-5VDC|
|Operating differential pressure||Conform to built-in mass flow controller specification|
|Pressure Resistance||Conform to built-in mass flow controller specification|
|INLET, OUTLET Valve||Solenoid Valve|
|Leak Integrity||≦5×10-7Pa･m3/sec He|
|Wetted surface material||SUS316, PTFE, Fluoro-Rubber
(FCST1000L Series: Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)
|Standard fitting||1/4in.SWL (equivalent) ※For other fittings, please contact us.|
|Operating environment||5-50℃, 30-80％RH (Scope of accuracy guarantee: 15-35℃)|
|Tank volume(*2)||Touch panel operation|
|Tank operating pressure||0.49 MPa|
|Mass flow control||Touch panel operation|
|Accessory||AC cable(2m), User’s manual, Written guarantee|
*1. At FCON, flow rates (SCCM, SLM) are converted to values at 0°C, 101.3kPa abs (1atm) for calibration.
*2. Other tank volumes please kindly discuss with us.