DF-550C is now released as an all-metal model of the high-performance digital mass flow controller DF-250C Series. The metal sealed structure enables a controlling measure of corrosive gases
The Model DF-350 Series is a digital mass flow controller with an integral indicator that operates on a 24-V power supply. It offers features equivalent to the DF-250 Series designed for up to 50 SLM.
The Model DF-300C Series is a mass flow controller with an integral indicator that operates on a 24-V power supply, as developed in response to the requests from users of the DF Series.
The DF-250 series is a high-performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers a large flow rate line-up up to 300SLM.
The DF-200 series is a high-performance digital mass flow controller with ±1%S.P. accuracy and ≤1-sec response.
It also has a multiple-gas and multiple-range function of seven gases.
EXE-FLOWTM was commercialized “Exact measurement” and “Excellent function as a concept. This is covered from a small flow rate (F.S.10sccm) to a large flow rate (F.S.200slm).
EX-550 used in a mass flow meter and controller extracts electrical signals without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control.
Fcon 2000 series is a digital mass flow controller with built-in display
The MEMS mass flow sensors are made with the company’s proprietary MEMS mass flow sensing technology featuring large dynamic range, high accuracy and long lifetime for gas, oxygen, compress air